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XU Jun
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Associate Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Paper Publications
[1]李建泉, Wenqi Lu, XU Jun.基于虚拟仪器的自动发射探针诊断装置[A],第十八届全国等离子体科学技术会议,2022,1
[2]gaopeng, XU Jun, piaoyong, 丁万昱, wangdehe, dongchuang.基体负偏压对SiCN薄膜结构和性能的影响[A],2006北京国际材料周暨中国材料研讨会,2022,362-368
[3]Ding Wan-Yu, XU Jun, Wenqi Lu, dengxinlv, dongchuang.基片温度对SiNx薄膜结晶状态及机械性能的影响[J],物理学报,2022,57(8):5170-5175
[4]谭伟, XU Jun, 王行行, Wenqi Lu.射频反应磁控溅射制备AlN多晶薄膜及其择优取向研究[J],真空科学与技术学报,2022,36(10):1092-1098
[5]曾其勇, 周娟, XU Jun, 邓新禄.射频反应磁控溅射法在高速钢基底上制备SiO_2薄膜[A],第八届全国真空冶金与表面工程学术会议,2022,1
[6]曾其勇, 周娟, XU Jun, 邓新禄.射频反应磁控溅射法在高速钢基底上制备SiO_2薄膜(英文)[A],第八届真空冶金与表面工程学术会议,2022,8
[7]gaopeng, XU Jun, dengxinlv, wangdehe, dongchuang.微波ECR全方位离子注入制备类金刚石碳膜的结构及摩擦学性能研究[J],物理学报,2022,54(7):3241-3246
[8]丁万昱, XU Jun, Wenqi Lu, dengxinlv, dongchuang.微波ECR磁控溅射制备SiNx薄膜的XPS结构研究[J],物理学报,2022,58(6):4109-4116
[9]庞见华, Wenqi Lu, 王行行, 贺佳, 辛煜, XU Jun.微波ECR等离子体增强溅射沉积类金刚石薄膜的在线诊断[A],第十五届全国等离子体科学技术会议论文集中国力学学会;中国核学会;中国物理学会,2022,79-79
[10]丁万昱, XU Jun, 李艳琴, piaoyong, gaopeng, dengxinlv, dongchuang.微波ECR等离子体增强磁控溅射制备SiNx薄膜及其性能分析[J],物理学报,2022,55(3):1363-1368
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