location： Current position: Home >> Scientific Research >> Paper Publications

微波ECR等离子体增强溅射沉积类金刚石薄膜的在线诊断

Hits:

Indexed by:会议论文

Date of Publication:2022-06-30

Journal:第十五届全国等离子体科学技术会议论文集中国力学学会;中国核学会;中国物理学会

Page Number:79-79

Note:新增回溯数据

Pre One:微波ECR磁控溅射制备SiNx薄膜的XPS结构研究

Next One:微波ECR等离子体增强磁控溅射制备SiNx薄膜及其性能分析
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep