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Indexed by:期刊论文

Date of Publication:2022-06-30

Journal:物理学报

Volume:54

Issue:7

Page Number:3241-3246

ISSN No.:1000-3290

Abstract:Diamond-like carbon(DLC) films were prepared on silicon (100) wafer by microwave electron cyclotron resonance(MW-ECR) plasma source ion implantation( PSII). The results showed that the films had typical properties of DLC. The films was dense and homogeneous, and the roughness and friction coefficient was low. The connection between the properties of the films and the flow ratio of hydrogen was closely. With the increase of the flow ratio of hydrogen to methane, the deposition rate and the roughness of the films decreased. The sp(3) bond obtained was more likely diamond like, which had low surface energy, consequently making the friction coefficient of the films decrease rapidly.

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