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射频等离子体探针装置

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First Author:Wenqi Lu

Disigner of the Invention:wangyounian,dengxinlv,XU Jun,dongchuang

Affilication of Author(s):物理学院

Application Number:CN101354406

Authorization number:CN200810013244.8

Pre One:等离子体诊断用多功能探针

Next One:一种凸凹探针及其等离子体诊断方法
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