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等离子体诊断用多功能探针

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First Author:Wenqi Lu

Disigner of the Invention:wangyounian,dengxinlv,XU Jun,dongchuang,邱大伟,范鹏辉

Affilication of Author(s):物理学院

Application Number:CN101650230

Authorization number:CN200910306774.6

Pre One:掩模限位连续组分扩展薄膜材料库制备方法

Next One:射频等离子体探针装置
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