Current position: Home >> Scientific Research >> Patents

等离子体诊断用多功能探针

Release Time:2022-10-20  Hits:

First Author: Wenqi Lu

Disigner of the Invention: 王友年,邓新绿,XU Jun,董闯,邱大伟,范鹏辉

Institution: 物理学院

Application Number: CN101650230

Authorization Number: CN200910306774.6

Prev One:掩模限位连续组分扩展薄膜材料库制备方法

Next One:射频等离子体探针装置