Current position: Home >> Scientific Research >> Patents

一种凸凹探针及其等离子体诊断方法

Hits:

First Author:Wenqi Lu

Disigner of the Invention:李建泉,XU Jun

Affilication of Author(s):物理学院

Application Number:201710096622.2

Pre One:射频等离子体探针装置

Next One:一种射频放电等离子体自偏置探针诊断方法
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep