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一种射频放电等离子体自偏置探针诊断方法

Release Time:2022-10-20  Hits:

First Author: Wenqi Lu

Disigner of the Invention: 王友年,XU Jun,程子洪,张星,林载祁,黄琦

Institution: 物理学院

Application Number: CN102156001A

Authorization Number: CN201110064085.6

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