Nanomechanical and Electrochemical Properties of Diamond-Like Carbon (DLC) Films Deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) Technique
Release Time:2023-02-09 Hits:
Date of Publication: 2022-10-07
Journal: Plasma Science and Technology
Institution: 化工学院
Volume: 12
Issue: 4
Page Number: 461-465
ISSN: 1009-0630