Zr-N films prepared by MW-ECR PE-UNB balanced magnetron sputtering:plasma diagnostics and structure evolution
Release Time:2023-02-09 Hits:
Date of Publication: 2022-10-04
Journal: Wuli Xuebao/Acta Physica Sinica
Institution: 运载工程与力学学部
Volume: 54
Issue: 7
Page Number: 3257-3262
ISSN: 1000-3290