Release Time:2024-10-17 Hits:
Date of Publication: 2022-10-08
Journal: Chinese Physics Letters
Institution: 物理学院
Volume: 16
Issue: 6
Page Number: 426-427
ISSN: 0256-307X
Prev One:Plasma Diagnosis for Microwave ECR Plasma Enhanced Sputtering Deposition of DLC Films
Next One:PSII系统中微波ECR等离子体的朗缪尔探针诊断