location: Current position: Home >> Scientific Research >> Paper Publications

超薄磁盘保护膜的制备技术

Hits:

Date of Publication:2022-10-07

Journal:真空

Volume:42

Issue:5

Page Number:17-21

ISSN No.:1002-0322

Note:新增回溯数据

Pre One:超薄SiNx薄膜腐蚀及摩擦磨损性能研究

Next One:Microstructure and mechanical properties of CeO2 doped diamond-like carbon films