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用在线椭偏仪研究非晶碳氢膜沉积和刻蚀过程

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Date of Publication:2022-10-06

Journal:核聚变与等离子体物理

Volume:27

Issue:2

Page Number:163-167

ISSN No.:0254-6086

Note:新增回溯数据

Pre One:甚高频大面积容性放电中电磁效应的实验研究

Next One:直流磁控溅射辉光等离子体的Langmuir静电探针诊断
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