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用在线椭偏仪研究非晶碳氢膜沉积和刻蚀过程

Release Time:2024-10-17  Hits:

Date of Publication: 2022-10-06

Journal: 核聚变与等离子体物理

Volume: 27

Issue: 2

Page Number: 163-167

ISSN: 0254-6086

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