激光-等离子体辅助化学气相沉积工艺数对氮化硅膜显微硬度的影响
Release Time:2024-10-17 Hits:
Indexed by: Journal Article
Date of Publication: 2022-07-03
Journal: 机械工程材料
Volume: 21
Issue: 3
Page Number: 7
ISSN: 1000-3738
Release Time:2024-10-17 Hits:
Indexed by: Journal Article
Date of Publication: 2022-07-03
Journal: 机械工程材料
Volume: 21
Issue: 3
Page Number: 7
ISSN: 1000-3738