Current position: Home >> Scientific Research >> Patents

基片梯度加热器

Release Time:2022-10-20  Hits:

First Author: Wenqi Lu

Disigner of the Invention: XU Jun,董闯

Institution: 物理学院

Application Number: CN101307434

Authorization Number: CN200810011450.5

Prev One:一种等离子体增强非平衡磁控溅射方法

Next One:一种钇掺杂二氧化铪铁电薄膜的制备方法
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep