GaN生长中的等离子体光谱研究
Release Time:2019-10-10 Hits:
Indexed by: Conference Paper
Date of Publication: 1999-08-09
Page Number: 124-127
Key Words: 氮化镓;等离子体;发射光谱
Release Time:2019-10-10 Hits:
Indexed by: Conference Paper
Date of Publication: 1999-08-09
Page Number: 124-127
Key Words: 氮化镓;等离子体;发射光谱