location： Current position: Home >> Scientific Research >> Paper Publications

蓝宝石衬底的ECR等离子体清洗与氮化的RHEED研究

Hits:

Date of Publication:2022-10-06

Journal:Pan Tao Ti Hsueh Pao Chinese Journal of Semiconductors

Affiliation of Author(s):物理学院

Issue:6

Page Number:668-672

ISSN No.:0253-4177

Note:新增回溯数据

Pre One:蓝宝石衬底分步清洗及其对后续氮化的影响

Next One:衬底氮化时间对玻璃衬底上低温沉积GaN薄膜结晶性的影响
Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep