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蓝宝石衬底的ECR等离子体清洗与氮化的RHEED研究

Release Time:2022-10-08  Hits:

Date of Publication: 2022-10-06

Journal: Pan Tao Ti Hsueh Pao Chinese Journal of Semiconductors

Institution: 物理学院

Issue: 6

Page Number: 668-672

ISSN: 0253-4177

Note: 新增回溯数据

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