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蓝宝石衬底分步清洗及其对后续氮化的影响

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Date of Publication:2022-10-06

Journal:半导体技术

Volume:30

Issue:1

Page Number:57-60

ISSN No.:1003-353X

Note:新增回溯数据

Pre One:蓝宝石基片的处理方法对ZnO薄膜生长行为的影响

Next One:蓝宝石衬底的ECR等离子体清洗与氮化的RHEED研究