蓝宝石衬底分步清洗及其对后续氮化的影响
Release Time:2022-10-08 Hits:
Date of Publication: 2022-10-06
Journal: 半导体技术
Volume: 30
Issue: 1
Page Number: 57-60
ISSN: 1003-353X
Note: 新增回溯数据
Release Time:2022-10-08 Hits:
Date of Publication: 2022-10-06
Journal: 半导体技术
Volume: 30
Issue: 1
Page Number: 57-60
ISSN: 1003-353X
Note: 新增回溯数据