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Date of Publication:2022-10-06
Journal:半导体技术
Volume:30
Issue:1
Page Number:57-60
ISSN No.:1003-353X
Note:新增回溯数据
Pre One:蓝宝石基片的处理方法对ZnO薄膜生长行为的影响
Next One:蓝宝石衬底的ECR等离子体清洗与氮化的RHEED研究