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一种β－碳化硅薄膜的制备方法

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First Author:Jiming Bian

Disigner of the Invention:张志坤,毕凯峰,liuyanhong,liuweifeng,Qin Fuwen

Application Number:CN201310293452.9

Authorization Date:2013-07-13

Authorization number:CN103346073A

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