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一种β-碳化硅薄膜的制备方法

Release Time:2019-03-09  Hits:

First Author: Jiming Bian

Disigner of the Invention: Qin Fuwen,刘维峰,刘艳红,毕凯峰,张志坤

Application Number: CN201310293452.9

Authorization Date: 2013-07-13

Authorization Number: CN103346073A

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