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电子回旋共振微波等离子体增强金属有机化学汽相沉积外延系统与技术

Release Time:2019-10-10  Hits:

First Author: 徐茵

Disigner of the Invention: Qin Fuwen,顾彪

Application Number: CN01101424.5

Authorization Date: 2001-01-11

Authorization Number: CN1364946

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