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基于MEMS工艺的金属微通道底板成型技术

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Leading Scientist:duliqun

Project Participants:songmancang

Supported by:企事业单位委托科技项目

Status:结题

Supported by:中国电子科技集团公司第十四研究所

Nature of Project:横向

Date of Project Approval:2018-04-15

Scheduled completion time:2020-12-31

Date of Project Initiation:2018-05-30

Date of Project Completion:2021-01-13

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