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安解装置的MEMS工艺技术开发

Release Time:2023-11-07  Hits:

Leading Scientist: 杜立群

Project Participants: 黄志平

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: Nanjing University of Aeronautics and Astronautics

Nature of Project: 横向

Date of Project Approval: 2022-03-10

Scheduled Completion Time: 2022-09-10

Date of Project Initiation: 2022-03-10

Date of Project Completion: 2024-09-11

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