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安解装置的MEMS工艺技术开发

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Leading Scientist:杜立群

Project Participants:huangzhiping

Supported by:企事业单位委托科技项目

Status:结题

Supported by:南京理工大学

Nature of Project:横向

Date of Project Approval:2022-03-10

Scheduled completion time:2022-09-10

Date of Project Initiation:2022-03-10

Date of Project Completion:2024-09-11

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