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硅基MEMS安全系统镀层工艺技术研究

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Leading Scientist:杜立群

Project Participants:huangzhiping

Supported by:企事业单位委托科技项目

Status:在研

Supported by:西安励德微系统科技有限公司

Nature of Project:横向

Date of Project Approval:2024-06-07

Scheduled completion time:2024-12-31

Date of Project Initiation:2024-06-01

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