location： Current position: Home >> Scientific Research >> Paper Publications

Application of ultrasonic stress relief in the fabrication of SU-8 micro structure

Hits:

Indexed by:期刊论文

Date of Publication:2011-01-01

Journal:Key Engineering Materials

Volume:483

Issue:1

Page Number:3-8

Pre One:Optimization of ultrasonic stress relief process parameters based on fuzzy neural network

Next One:Experimental study on ultrasonic stress relief for cured SU-8 photoresist layer
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep