Release Time:2016-12-10 Hits:
Indexed by: Journal Papers
Date of Publication: 2009-12-01
Journal: 纳米技术与精密工程
Included Journals: EI
Volume: 7
Issue: 1
Page Number: 36-40
Prev One:Stress reduction method in fabrication of a multi-scale inertial switch with ultra-high aspect ratio
Next One:跨尺度、高深宽比惯性微开关制作工艺研究