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A low-g MEMS inertial switch with a novel radial electrode for uniform omnidirectional sensitivity

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Indexed by:Journal Papers

Date of Publication:2018-02-01

Journal:Sensors and Actuators, A: Physical

Included Journals:SCI、EI

Volume:270

Page Number:214-222

Pre One:MEMS铜线圈UV-LIGA制备工艺
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