location: Current position: Home >> Scientific Research >> Paper Publications

SiC微粒辅助掩膜电解加工金属微孔阵列结构的研究

Hits:

Date of Publication:2024-05-25

Journal:电镀与涂饰

Volume:42

Issue:07

Page Number:47-54

Key Words:奥氏体不锈钢; 定域性; 微孔阵列结构; 掩膜电解加工; 碳化硅微粒; 蚀刻因子

CN No.:44-1237/TS

Pre One:大高宽比阶梯型铜微柱阵列的制作

Next One:Etching uniformity study of mask electrolyte jet machining based on mass transfer coefficient: 3D simulation and experimental validation