Fabrication of high-aspect-ratio stepped Cu microcolumn array using UV-LIGA technology
Release Time:2024-06-30 Hits:
Indexed by: Journal Papers
Document Code: 370424
Date of Publication: 2023-07-18
Journal: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume: 29
Issue: 7
Page Number: 999-1014
ISSN: 0946-7076
Key Words: MASS-TRANSFER; PHOTORESIST