Towards understanding uniformity of megasonic-assisted through-mask electrochemical micromachining based on bubble dynamics
Release Time:2024-06-30 Hits:
Indexed by: Journal Papers
Document Code: 364400
Date of Publication: 2023-06-30
Journal: JOURNAL OF MANUFACTURING PROCESSES
Volume: 96
Page Number: 125-137
ISSN: 1526-6125
Key Words: ECM; MICRO-DIMPLE ARRAYS; SIMULATION; SURFACE