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基于微电铸工艺的镍微型惯性开关的研制

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Date of Publication:2022-10-10

Journal:电加工与模具

Affiliation of Author(s):机械工程学院

Issue:2

Page Number:47-51

ISSN No.:1009-279X

Note:新增回溯数据

Pre One:基于SU-8厚胶光刻工艺的微电铸铸层尺寸精度控制新方法

Next One:在金属基底上制作高深宽比金属微光栅的方法
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