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基于元胞自动机算法的三维玻璃微流控芯片湿法刻蚀模拟研究

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Date of Publication:2022-10-10

Journal:计算机学报

Affiliation of Author(s):机械工程学院

Issue:5

Page Number:868-874

ISSN No.:0254-4164

Abstract:For Isotropic chemical etching properties of glass, an algorithm based on improved continuous cellular automata (CA) model is produced, which develops the traditional CA model. It can be used for wet etching of glass in three-dimensional (3-D) space. To improve the efficiency of algorithm, structure with linked list data is used to store etched cell. With the improvement of the storage mode, a 3-D cellular matrix can be stored in 2-D Array. The result of simulation is displayed with OpenGl 3-D technology. The glass etching simulation program based on common personal computer platforms has been realized with high resolution (4000 × 4000 Pixels) and visualizing results in 3-D space. The results of etching experiments are used as comparison to assess the implementations, which show that the model is able to forecast the result of etching glass. This study shows that 3-D CA model is an effective solution to the glass etching process task.

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