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Indexed by:期刊论文

Date of Publication:2014-06-01

Journal:SENSORS AND ACTUATORS A-PHYSICAL

Included Journals:SCIE、EI、Scopus

Volume:212

Page Number:93-101

ISSN No.:0924-4247

Key Words:Omnidirectional inertial switch; MEMS; Flexible electrode; Enhanced contact effect

Abstract:A novel MEMS omnidirectional inertial switch was designed, simulated and fabricated. The switch is composed of three main parts, the proof mass, the axial flexible electrode and four radial flexible electrodes. It introduces the flexible electrodes to form a dual mass-spring system. The switch has omnidirectional sensitivities in a half sphere. When any acceleration, over the threshold value in radial on and axial direction, acts to the switch, the switch will turn on. Also, the switch has the enhanced contact effect. Dynamic simulation results based on FEM confirm that the contact effect is improved by this new design compared to that of traditional inertial switch. The contact duration is prolonged under the shock loading, and the bouncing effect is alleviated. The switch has a 6-layer structure, which is manufactured based on non-silicon surface micromachining technology. The tests have been done and the results coincide with that of the simulation. (c) 2014 Elsevier B.V. All rights reserved.