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超声提高SU-8光刻胶与金属基底界面结合强度的方法

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Disigner of the Invention:赵姗姗,赵明,王翱岸,张晓蕾,杜立群

Type of Patent:Invention

Authorization Date:2015-12-23

Authorization number:ZL 201310205724.5

Service Invention or Not:no

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