Current position: Home >> Scientific Research >> Patents

金属基底上制备高深宽比金属微光栅的方法

Release Time:2016-12-06  Hits:

Disigner of the Invention: 杜立群,赵明,鲍其雷,谭志成,王翱岸

Type of Patent: Invention

Authorization Date: 2015-12-30

Authorization Number: ZL 201410134217.1

Service Invention or Not: No

Prev One:金属镍基底上制备高密集微细镍圆柱阵列的方法

Next One:一种自由曲面灰度掩膜的设计方法