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采用电子束注入去除多晶硅中杂质硼的方法

Release Time:2016-08-09  Hits:

Disigner of the Invention: Yi Tan,姜大川,邹瑞洵,董伟

Institution: 材料科学与工程学院

Application Date: 2010-07-29

Application Number: 201010242065.9

Authorization Date: 2012-01-25

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