o0iP0mVL8cld53ZxYFfe3pX8K0LV2Au2vvtADcit7iqVfdT9PK8Gz3w8GjAx
Current position: Home >> Scientific Research >> Research Projects

全集成红外气体传感器用MEMS红外光源开发

Release Time:2019-03-21  Hits:

Leading Scientist: TANG

Project Participants: Jun Yu,黄正兴

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: China Electronics Technology Group Chongqing Acoustics, Optics and Electronics Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2018-01-11

Scheduled Completion Time: 2020-12-31

Date of Project Initiation: 2018-01-11

Date of Project Completion: 2021-09-15

Prev One:MEMS气体传感器气敏材料的EHD微滴打印关键技术研究

Next One:基于形变在线调控技术研究微热板气体传感器在应力作用下的稳定性和可靠性