Release Time:2019-03-11  Hits:

Indexed by: Conference Paper

Date of Publication: 2011-10-28

Included Journals: Scopus、CPCI-S、EI

Page Number: 870-873

Abstract: A novel double layer micro-bridge calorimeter structure is designed, in which an upper bridge suspends upon the lower one with its center membrane covering that of the lower one. This structure enables the self-align sputtering deposition of sample films with thickness of sub-micrometers easily without shadow mask. Finite element analyses simulation shows that this double layer calorimeter has the similar performance as the traditional micro-calorimeters, and the measurement error is less than 0.5 nJ/K and it can accurately measures the melting point of the sample film.