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掺杂氧化镓膜的制备方法及掺杂氧化镓膜

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Leading Scientist:夏晓川

Project Participants:hulizhong,duguotong,lianghongwei,liuyang,Shen Rensheng

Supported by:企事业单位委托科技项目

Status:在研

Supported by:申集半导体科技(徐州)有限公司

Nature of Project:横向

Date of Project Approval:2022-12-26

Scheduled completion time:2023-03-30

Date of Project Initiation:2022-12-26

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