Synthesis of GaN network by nitridation of hexagonal epsilon-Ga2O3 film
Release Time:2023-03-15 Hits:
Date of Publication: 2022-10-09
Journal: JOURNAL OF MATERIALS SCIENCE MATERIALS IN ELECTRONICS
Institution: 微电子学院
Volume: 28
Issue: 3
Page Number: 2598-2601
ISSN: 0957-4522