Growth Pressure Controlled Nucleation Epitaxy of Pure Phase epsilon- and beta-Ga2O3 Films on Al2O3 via Metal-Organic Chemical Vapor Deposition
Release Time:2024-12-06 Hits:
Date of Publication: 2022-10-02
Journal: CRYSTAL GROWTH DESIGN
Volume: 18
Issue: 2
Page Number: 1147-1154
ISSN: 1528-7483