location: Current position: Home >> Scientific Research >> Paper Publications

Experimental and Numerical Studies of Pulse-Modulated ICP Discharges

Hits:

Indexed by:会议论文

Date of Publication:2014-01-01

Page Number:36-36

Pre One:Experimental and numerical investigations of the phase-shift effect in capacitively coupled discharges

Next One:Mode transition in CF4 + Ar inductively coupled plasma