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赵书霞
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Associate Professor Supervisor of Master's Candidates
Research Projects
高密度感应耦合等离子体源合作研究, 2013/01/25, 结题
射频感性耦合碳氟性等离子体的放电机理和基片偏压效应的研究, 2013/10/28-2017/05/01, 结题
碳氟性等离子体的放电机理和刻蚀过程的研究, 2013/09/25-2016/12/31, 结题
大功率低压射频感性耦合负氢离子源的物理基础研究, 2014/12/31, 结题
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