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碳氟性等离子体的放电机理和刻蚀过程的研究

Release Time:2016-08-09  Hits:

Leading Scientist: 赵书霞

Project Source: 国家自然科学基金项目

Sub-Class of Project: 青年科学基金项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 11305023

Date of Project Approval: 2013-09-25

Scheduled Completion Time: 2016-12-31

Date of Project Initiation: 2014-01-01

Date of Project Completion: 2016-12-31

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