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射频感性耦合碳氟性等离子体的放电机理和基片偏压效应的研究

Release Time:2016-08-09  Hits:

Leading Scientist: 赵书霞

Project Source: 主管部门科技项目

Status: 结题

Supported by: The Center for Science and Technology Development of the Ministry of Education

Nature of Project: 纵向

Project Approval Number: 20130041120054

Date of Project Approval: 2013-10-28

Scheduled Completion Time: 2016-12-31

Date of Project Initiation: 2014-01-01

Date of Project Completion: 2017-05-01

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