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Scientific Research
赵书霞
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Associate Professor Supervisor of Master's Candidates
Scientific Research
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Xu Hui-Jing, zhaoshuxia, Fei Gao, Zhang YuRu, lixuechun, wangyounian.Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model[J],Chinese Physics B,2022,24(11)
zhaoshuxia, Fei Gao, wangyounian.Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model[J],JOURNAL OF PHYSICS D APPLIED PHYSICS,2022,42(22)
zhaoshuxia, Fei Gao, Wang, Ya-Ping, wangyounian, Bogaerts, Annemie.Effects of feedstock availability on the negative ion behavior in a C4F8 inductively coupled plasma[J],JOURNAL OF APPLIED PHYSICS,2022,118(3)
Fei Gao, zhaoshuxia, lixiaosong, wangyounian.Effects of matching network on the hysteresis during E and H mode transitions in argon inductively coupled plasma[J],PHYSICS OF PLASMAS,2022,17(10)
Fei, G., wangyounian, Yu-Ru, Z., Shu-Xia, Xue-Chun, L., You-Nian, W., Fei Gao, Zhang YuRu, zhaoshuxia, lixuechun.Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias[J],Chinese Physics B,2022,23(11)
zhaoshuxia, Zhang YuRu, Fei Gao, lixuechun, wangyounian.Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas[J],Physcis of Plasmas,2022,22(4):43508-43508
Patents
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Published Books
Mode Transition and Hysteresis in Inductively Coupled Plasma Sources
Research Projects
高密度感应耦合等离子体源合作研究, 企事业单位委托科技项目, 2013/01/25, 结题
射频感性耦合碳氟性等离子体的放电机理和基片偏压效应的研究, 主管部门科技项目, 2013/10/28-2017/05/01, 结题
碳氟性等离子体的放电机理和刻蚀过程的研究, 国家自然科学基金项目, 2013/09/25-2016/12/31, 结题
大功率低压射频感性耦合负氢离子源的物理基础研究, 国家科技部, 2014/12/31, 结题