Rv1Q0yA0kzLXRsngLJNiLD4eIEmMM03ylm04sC1Kde6rWsa5VkAFB9RptCck
Current position: Home >> Scientific Research >> Paper Publications

射频感性耦合C4F8等离子体的离解和电离机制

Release Time:2025-03-23  Hits:

Indexed by: Conference Paper

Date of Publication: 2022-06-30

Journal: 第十七届全国等离子体科学技术会议

Institution: 物理学院

Page Number: 1-26

Note: 新增回溯数据

Prev One:射频感应耦合等离子体的模式跳变及偏压效应的实验研究

Next One:射频感性耦合的电负性双原子分子气体放电的空间特征形貌
Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep