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射频感应耦合等离子体的模式跳变及偏压效应的实验研究

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Indexed by:会议论文

Date of Publication:2022-06-30

Journal:第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会论文集中国力学学会;中国物理学会;中国核学会

Affiliation of Author(s):物理学院

Page Number:290-290

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Next One:射频感性耦合C4F8等离子体的离解和电离机制
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