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射频感应耦合等离子体的模式跳变及偏压效应的实验研究

Release Time:2025-03-23  Hits:

Indexed by: Conference Paper

Date of Publication: 2022-06-30

Journal: 第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会论文集中国力学学会;中国物理学会;中国核学会

Institution: 物理学院

Page Number: 290-290

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