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射频感应耦合CF4/Ar等离子体中模式转换的实验研究

Release Time:2025-03-23  Hits:

Indexed by: Conference Paper

Date of Publication: 2022-06-30

Journal: 第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会论文集中国力学学会;中国物理学会;中国核学会

Page Number: 286-286

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