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射频容性耦合放电流体力学仿真模型的多样性分析

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Indexed by:会议论文

Date of Publication:2022-06-30

Journal:第十八届全国等离子体科学技术会议

Page Number:1

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Pre One:复变函数z1/n的多值性问题及其教学意义

Next One:射频感应耦合CF4/Ar等离子体中模式转换的实验研究
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