Release Time:2016-08-09  Hits:

Leading Scientist: 赵书霞

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: Beijing Northern Microelectronics Base Equipment Technology Research Center Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2013-01-25

Scheduled Completion Time: 2013-06-30

Date of Project Initiation: 2013-01-25