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Simulation of mode transitions in capacitively coupled Ar/O2 plasmas

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Date of Publication:2024-10-10

Journal:PLASMA SCIENCE & TECHNOLOGY

Volume:26

Issue:11

ISSN No.:1009-0630

Key Words:BREAKDOWN; DISCHARGE; FREQUENCY; GLOBAL-MODEL; HIGHER HARMONIC-GENERATION; LOW-PRESSURE; OZONE; WAVE

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