Simulation of mode transitions in capacitively coupled Ar/O2 plasmas
Release Time:2025-02-23 Hits:
Indexed by: Journal Papers
Document Code: 398986
Date of Publication: 2024-11-01
Journal: PLASMA SCIENCE & TECHNOLOGY
Volume: 26
Issue: 11
ISSN: 1009-0630
Key Words: BREAKDOWN; DISCHARGE; FREQUENCY; GLOBAL-MODEL; HIGHER HARMONIC-GENERATION; LOW-PRESSURE; OZONE; WAVE